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300mm
300mm Hot Chuck Heater
A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.
300mm Compressed Heater Chuck
Innovative manufacturing process lowers cost.
300mm Vacuum Heater Pedestal
Vacuum Heater Pedestal for the manufacturing of 300mm silicon wafers.
Two Zone 300mm Vacuum Heater Chuck Pedestal
Vacuum Heater Pedestal for the manufacturing of 300mm silicon wafers; two zones for better temperature uniformity
200mm
200mm High Temp Heater Chuck
Exceptional uniformity, vacuum integrity, temperature stability.
200mm 8” Copper Molybdenum (CuMo) Heater Chuck
Better Uniformity, Higher Temperature Threshold
High Temp Puck Heater - 200mm
The demand for high temperature applications in various industries has led to the development of the High Temp Puck Heater - 200mm.
150mm
Vacuum Pedestal Heater
Heating solution for an ALD Vacuum Chamber Heater.
150mm 6" Stainless Heater Chuck
Beyond the limits of aluminum.
Clamped-In Coil Heater
Provides excellent temperature uniformity at lower cost.
100mm
Vented Hole Heater Chuck
Elevate your semiconductor processes to the next level with BCE's Vented Hole Heater Chuck.
450mm
450mm Vacuum Heater Chuck
Atomic Layer Deposition (ALD) Application up to 450°C
Platens Vacuum or Atmosphere
Vacuum Heater Platens
Can be used in vacuum and atmosphere for electronic processing of next-generation displays such as computer monitors and smartphones.
Vacuum Heated Platen - 350mm
Solution in a vacuum chamber for the testing and processing of silicon and glass components.
High Temp Puck Heater
The demand for high temperature applications in various industries has led to the development of the innovative High Temp Puck Heater.
Extrusion Die Heater
Extrusion is a continuous process that can be adapted to produce a wide range of finished or semi-finished products. Extrusion machines are fitted with a variety of dies.
Vacuum and Atmosphere Heater Chucks and Platens for the Semiconductor Wafer & Standard Manufacturing Processes
Industrial process tools used for memory devices, transistors, crystal silicon, microprocessors, photovoltaic (PV) cells, and thin film PV cells. All these applications required a shrewd knowledge of temperature, BCE continues to innovate and provide customer specific thermal solutions that are critical to next generation equipment and processes.
Resistive heaters that provide a very high level of temperature uniformity across the semiconductor wafer to ensure consistent quality plus highly repeatable and efficient wafer processing. Aluminum 6061-T6 heaters are vacuum brazed with operating temperatures up to 450°C, temperature uniformity of +/-1%, and can have a 2-3Ra µin surface finish. The heaters can be tested for up to 100 m-ohm Isolation at 1000VDC and Hi-pot of 2E+1,000 or greater at 1-3mA.
Stainless steel and Inconel heater plates/chucks can reach temperatures of up to 700°C+ with ceramic thermal breaks in between the flange and the base plate. These heater plates are generally welded with three mating plugs for compression and have an outside weld on the edge. They can be built with grounded internal thermocouples for a quick response to the resistance wire for ramping and high temperature monitoring. This ensures that over-temperature circuit breaks can be minimized while maintaining the quickest reaction time in scaling down a fast ramp rate.
The BCE Advantage
- Engineering support for new and existing designs
- Rapid prototyping and machine parts
- Quick responses on inquiries and quotations
- Proprietary internal element patterns
- Expertise in semiconductor process heating and sensing based in Silicon Valley
- Flatness and temperature uniformity engineering
- Dielectric, temperature, and m-Ohm testing onsite with Certs of Conformance
- Vacuum feedthrough design on all sensors, heaters, and atmospheric connections
- Bench testing on new and existing designs
Heater Designs for Semiconductor Processing & Standard Manufacturing
- Immersion heaters using 316 Stainless Steel Sheath
- Alumina heaters
- Pedestal heaters in Aluminum, Stainless, and Inconel
- Bake/Chill Platens
- Vacuum Ring Heaters
- Bake/Chill Pedestals
- Brazed-in 76mm to 300mm Heater Chucks
- Clamp-in Coil Heaters
QUALITY
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
